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根据提供的信息，我们可以详细解析与Silvaco TCAD软件相关的知识点。这将涵盖软件的基本介绍、功能特性以及如何使用该软件进行半导体器件的仿真。 ### Silvaco TCAD 软件简介 #### 标题：“Silvaco学习资料” #### 描述：“比较详细的讲解半导体仿真软件TCAD的使用，是学习半导体仿真的好资料。” #### 标签：“Silvaco” #### 部分内容摘要：这部分内容包含了一些杂乱无章的文字，但从中可以提取出有关Silvaco TCAD软件的信息，接下来我们将对这些信息进行整理和解释。 ### Silvaco TCAD 基本概念 Silvaco TCAD是一款广泛应用于半导体器件设计与仿真的软件工具。它可以帮助工程师和研究人员在产品开发早期阶段预测器件性能，并优化其结构参数。 #### 1.1 Silvaco TCAD 概述

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_0"></span>ý<span class="ff6">ó<span class="_ _0"></span>ó<span class="_ _0"></span>ó<span class="ff7">ä<span class="_ _0"></span>ä<span class="_ _0"></span>ä<span class="_ _1"> </span><span class="ff8">Silv<span class="_ _2"></span>aco<span class="_ _3"> </span>TCAD</span></span></span></span></span></span></span></div><div class="t m0 x2 h3 y2 ff9 fs0 fc0 sc0 ls0 ws0">Æ<span class="_ _0"></span>Æ<span class="_ _0"></span>Æ<span class="ffa">S<span class="_ _0"></span>S<span class="_ _0"></span>S<span class="ffb">]<span class="_ _0"></span>]<span class="_ _0"></span>]<span class="ffc"><span class="_ _0"></span><span class="_ _0"></span></span></span></span></div></div><div class="pi" data-data='{"ctm":[1.568627,0.000000,0.000000,1.568627,0.000000,0.000000]}'></div></div><div id="pf2" class="pf w0 h0" data-page-no="2"><div class="pc pc2 w0 h0"><img class="bi x0 y0 w1 h1" alt="" src="/image.php?url=https://csdnimg.cn/release/download_crawler_static/90182334/bg2.jpg"></div><div 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class="ff21">é</span></span></span></span></span></span></div><div class="t m0 x5 h5 y6 ff16 fs2 fc0 sc0 ls0 ws0">u<span class="ff10">Silv<span class="_ _6"></span>aco<span class="ff11"><span class="ff12">ý<span class="_ _5"></span><span class="ff21"><span class="ff29"><span class="_ _5"></span><span class="ff2a">]<span class="ffe">/<span class="_ _5"></span><span class="ff14"></span></span></span></span><span class="_ _5"></span><span class="ffe">²<span class="ff15"><span class="_ _5"></span><span class="ff1f">"<span class="ff20">Æ<span class="_ _5"></span><span class="ff1e">S<span class="ff17">Ú<span class="_ _5"></span><span class="ff19">¦<span class="ff16">^</span></span></span></span></span></span></span></span></span></span></span>Silv<span class="_ _6"></span>aco<span class="ff21"><span class="_ _5"></span><span class="ff19"><span class="ff17">ÿ<span class="_ _5"></span><span class="ff25"><span class="ff13"><<span class="_ _5"></span></span></span></span></span><span 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class="t m0 x8 h5 y9 ff10 fs2 fc0 sc0 ls0 ws0">X<span class="ff12">3<span class="ff2e">ü<span class="ff27"><span class="ff19">Ö<span class="ff14">7<span class="ff13">þ<span class="_ _5"></span><span class="ff17">Ú</span></span></span></span></span></span></span>w<span class="_ _8"></span>ord<span class="ff21"><span class="ff28">Ø<span class="ff24">Ó<span class="ff1f">"<span class="ffe">²<span class="ff17">L<span class="_"> </span><span class="ff12">ù<span class="_ _5"></span><span class="fff">g</span></span></span></span></span></span>?<span class="ff2e">ü<span class="ffe">ú</span></span></span></span></div><div class="t m0 x5 h9 yc ff21 fs2 fc0 sc0 ls0 ws0"><span class="_ _5"></span><span class="ff25"><span class="_ _5"></span><span class="ff16">k<span class="_ _5"></span>`<span class="_"> </span><span class="ff13">"<span class="_ _5"></span></span></span></span>:<span class="_ _5"></span><span class="ff1f">"<span class="ff10">L</span></span></div><div class="t m0 x9 h7 yd ff2d 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_5"></span><span class="ff26">·<span class="_ _5"></span></span></span></span></span></span></span>3<span class="_ _5"></span><span class="ff2e">ü<span class="_ _5"></span><span class="fff">d<span class="_ _5"></span><span class="ff19">Ö<span class="_ _5"></span></span></span></span></span><span class="_ _5"></span><span class="ff19"><span class="_ _5"></span><span class="ff17">ÿ<span class="ffe">²<span class="_ _5"></span><span class="ff18">~<span class="_ _5"></span><span class="ff16"><span class="_ _5"></span></span></span></span></span></span></span></div><div class="t m0 x5 h6 yf ff24 fs2 fc0 sc0 ls0 ws0">ã<span class="ff1c">¡<span class="ff17">Ú<span class="_ _5"></span><span class="ff28">L<span class="ff25"><span class="ff27">U<span class="_ _5"></span><span class="ff12">ì<span class="ff2a">g<span class="ff21">Ä<span class="_ _5"></span><span class="ff11"><span class="ff19">ª<span class="ff2e">ü<span class="_ _5"></span></span></span></span><span class="ff26"><span 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</span><span class="ff25"><span class="_ _5"></span><span class="ff18"><span class="_ _5"></span><span class="ff29">m<span class="_ _5"></span><span class="ff21"><span class="_ _5"></span><span class="ff1f">"<span class="_ _5"></span><span class="ff13">X<span class="_ _5"></span><span class="ff17">J<span class="_ _5"></span></span></span></span></span></span></span><span class="_ _5"></span><span class="ff26"><span class="_ _5"></span><span class="ff16"><span class="_ _5"></span><span class="ff21"><span class="_ _5"></span><span class="ff17">é<span class="_ _5"></span><span class="ff24">ø<span class="_ _5"></span><span class="ffe">!<span class="_ _5"></span></span></span></span><span class="_ _5"></span>/<span class="_ _5"></span><span class="ff11"><span class="_ _5"></span></span></span></span></span></span></span></span><span class="_ _5"></span><span class="ff2f"><span class="_ _5"></span><span class="ff14"><span class="_"> </span><span class="ff1a"><span class="_ _5"></span><span class="ff1f">"<span class="ff10">L</span></span></span></span></span></span></div><div class="t m0 xd h7 y11 ff2d fs3 fc0 sc0 ls0 ws0">A</div><div class="t m0 xe h8 y10 ff10 fs2 fc0 sc0 ls0 ws0">T</div><div class="t m0 xf h8 y12 ff10 fs2 fc0 sc0 ls0 ws0">E</div><div class="t m0 x10 h6 y10 ff10 fs2 fc0 sc0 ls0 ws0">X<span class="ff21"><span class="_ _5"></span><span class="ff19">¦<span class="_ _5"></span><span class="ff16">^<span class="_ _5"></span><span class="ff20">I<span class="_"> </span><span class="ff15"><span class="_ _5"></span></span></span>k<span class="_ _5"></span><span class="ff17">é<span class="_ _5"></span><span class="ff2f">r<span class="_ _5"></span></span></span></span></span><span class="_ _5"></span><span class="ff2e">F</span></span></div><div class="t m0 x5 h6 y13 ff20 fs2 fc0 sc0 ls0 ws0">%<span class="_"> </span><span class="ff17">Ú<span class="_ _5"></span><span class="ff24">&<span class="_ _5"></span><span class="ff2b">¢<span class="_ _5"></span><span class="ffe">°<span class="_ _5"></span><span class="ff19"> <span class="ff1b">§<span class="_ _5"></span><span class="ff15"><span class="_ _5"></span><span class="ff29"><span class="_ _5"></span></span>±<span class="_ _5"></span></span></span></span></span>`<span class="ff19">´<span class="_ _5"></span><span class="ff26">ã<span class="_ _5"></span></span>+<span class="_ _5"></span><span class="ffe">°<span class="_ _5"></span></span> <span class="ff1f">"<span class="_ _5"></span><span class="ff28">Ø<span class="_ _5"></span></span></span></span></span></span>+<span class="_ _5"></span><span class="ff19">´<span class="ff10">MS<span class="_ _7"> </span>Oﬃce<span class="ff1d"></span></span>´<span class="ff10">L</span></span></span></div><div class="t m0 xd h7 y14 ff2d fs3 fc0 sc0 ls0 ws0">A</div><div class="t m0 xe h8 y13 ff10 fs2 fc0 sc0 ls0 ws0">T</div><div class="t m0 xf h8 y15 ff10 fs2 fc0 sc0 ls0 ws0">E</div><div class="t m0 x10 h6 y13 ff10 fs2 fc0 sc0 ls0 ws0">X<span class="ff1b">§<span class="_"> </span><span class="ff2a">o<span class="_ _5"></span><span class="ff21"><span class="_ _5"></span><span class="ff2e">8<span class="_ _5"></span></span><span class="_ _5"></span><span class="ff19">´<span class="ff1e"><span class="_ _5"></span><span class="ff2e">S<span class="_ _5"></span><span class="ff13">N<span class="_ _5"></span><span class="ff24">Ï</span></span></span></span></span></span></span></span></div><div class="t m0 x5 h6 y16 ff2b fs2 fc0 sc0 ls0 ws0">^<span class="ff1b">§<span class="ff12"><span class="ff21">Ö<span class="ff1c">å<span class="ff23">5<span class="ff19">Ó<span class="ff11">Ñ</span></span></span></span></span></span>§<span class="ff16">^<span class="ff19"><span class="ff2c">o<span class="ff25">ó<span class="ffe">äÒ</span></span></span>´<span class="ff10">“<span class="ff27">l<span class="ff1e">l<span class="ff17">L°</span></span></span></span></span></span>§<span class="ff25"><span class="ff1e">w<span class="ff19"> <span class="ff24">Ï<span class="ff10">”<span class="ff1a"><span class="ff1f">"</span></span></span></span></span></span></span></span></div><div class="t m0 x4 h5 y17 ff12 fs2 fc0 sc0 ls0 ws0">ý<span class="ff18">ª<span class="ff21">/<span class="ff1e">F<span class="ff26">"<span class="ff28"><span class="ff19">Ö</span></span></span></span></span></span>3<span class="fff"><span class="ff14">[<span class="ff24">&<span class="ff2b">¢<span class="ff11"></span></span></span></span></span>ý<span class="ff21"><span class="ff1a">À<span class="ff24">å<span class="ff13">þ<span class="ff2e">U<span class="ff1c">å</span></span></span></span></span><span class="ff15"></span>½<span class="ff22"><span class="ff15">Ú<span class="ff2a"><span class="ff16">^<span class="ff1f">"</span></span></span></span></span></span></div><div class="t m0 x4 h6 y18 ff25 fs2 fc0 sc0 ls0 ws0">a<span class="ff20"><span class="ff19"><span class="ff23">P</span></span></span><span class="ff26">·<span class="ff12">ù</span></span><span class="ff1d">Å¬<span class="ff1b">§<span class="ff28">Ø<span class="ff13">,<span class="ff26">·<span class="ff15"><span class="ff2c">v<span class="ff16">k]<span class="ff1c">í<span class="ff1e">e<span class="ffe">û<span class="ff20">%<span class="ff12">ù</span></span></span></span></span></span></span></span></span></span></span></span></span><span class="ff20">%<span class="ff21"><span class="ff1f">"</span></span></span></div><div class="t m0 x4 h5 y19 ff28 fs2 fc0 sc0 ls0 ws0"><span class="ff13"><<span class="ff2b">¤<span class="ff20">Æ<span class="ff16">k<span class="ff1e"><span class="ff1b">§<span class="fff"><span class="ff26">Ø<span class="ff17">Ú</span></span></span></span></span></span></span></span></span>Ø<span class="ff2a">v<span class="ff22"><span class="fff">?<span class="ff12">3<span class="ff2b">¤<span class="ff2e">J<span class="ff2c"><span class="ff1f">"<span class="ff13">X</span></span><span class="ff1c">1µ</span></span></span></span></span></span><span class="ff1b">§<span class="ff26">·<span class="ff14">ò<span class="ff25">a</span>-</span></span></span></span></span>Ø<span class="ffe">¦<span class="ff1f">"</span></span></div><div class="t m0 x11 ha y1a ff30 fs4 fc0 sc0 ls0 ws0">-<span class="_ _9"> </span>i<span class="_ _9"> </span>-</div></div><div class="pi" data-data='{"ctm":[1.568627,0.000000,0.000000,1.568627,0.000000,0.000000]}'></div></div><div id="pf4" class="pf w0 h0" data-page-no="4"><div class="pc pc4 w0 h0"><img class="bi x0 y0 w1 h1" alt="" src="/image.php?url=https://csdnimg.cn/release/download_crawler_static/90182334/bg4.jpg"><div class="t m0 x12 h6 y1b ffe fs2 fc0 sc0 ls0 ws0">><span class="ff15">±<span class="_ _5"></span><span class="fff">d<span class="_ _5"></span><span class="ff19">Ö<span class="ff1e">z<span class="_ _5"></span><span class="ff25"><span class="_ _5"></span><span class="ff26">·<span class="_ _5"></span><span class="ff20">"<span class="ff2f"><span class="_ _5"></span><span class="ff23">N<span class="_ _5"></span><span class="ff2a"><span class="ff21"><span class="_ _5"></span></span></span></span></span></span></span>I<span class="_ _5"></span><span class="ff2e">1<span class="ff1b">§<span class="_ _5"></span><span class="ff22"><span class="_ _5"></span></span></span></span></span></span>´<span class="ff2b">¦<span class="_ _5"></span><span class="ff2c"><span class="_ _5"></span><span class="ff28">Ø<span class="_ _5"></span><span class="ff20">ó<span class="ff21"><span class="_ _5"></span></span></span></span></span></span></span></span></span><span class="_ _5"></span><span class="ff1d">°<span class="ff19">¦<span class="_ _5"></span><span class="ff26">·<span class="_ _5"></span><span class="ff15"><span class="ff28">Ú<span class="_ _5"></span>Ú<span class="_ _5"></span><span class="ff18">¤<span class="_ _5"></span><span class="ff21"><span class="_ _5"></span></span></span></span></span></span></span></span>8<span class="_"> </span><span class="ff24">U<span class="_ _5"></span><span class="ff1b">§<span class="_ _5"></span><span class="ff2a">6<span class="_ _5"></span><span class="ff2b">¦</span></span></span></span></div><div class="t m0 x13 h5 y1c ff2c fs2 fc0 sc0 ls0 ws0"><span class="ff16">[<span class="ff12"><span class="ff14">è<span class="ff29">x<span class="ff20">3<span class="ff25">4<span class="ff17">Ú</span></span></span>¯<span class="ff23">W<span class="ff1f">"</span></span></span></span></span></span></div><div class="t m0 x14 h6 y1d ff1d fs2 fc0 sc0 ls0 ws0">z<span class="ff1a">9<span class="ffe">Ø<span class="ff19">¬</span></span></span></div><div class="t m0 x15 h7 y1e ff2d fs3 fc1 sc0 ls0 ws0">1</div><div class="t m0 x16 h5 y1f ff10 fs2 fc0 sc0 ls0 ws0">2009<span class="ff2e">c</span>5<span class="ff12"><span class="_ _a"> </span><span class="ff16">u<span class="_ _a"> </span><span class="ff26">"<span class="ff14">ô</span></span></span></span></div><div class="t m0 x17 hb y20 ff31 fs5 fc0 sc0 ls0 ws0">1</div><div class="t m0 x18 h7 y21 ff2d fs3 fc0 sc0 ls0 ws0">shaohuac<span class="_ _6"></span>hn@126.com</div><div class="t m0 x19 ha y22 ff30 fs4 fc0 sc0 ls0 ws0">-<span class="_ _9"> </span>ii<span class="_ _9"> </span>-</div><a class="l"><div class="d m1"></div></a></div><div class="pi" data-data='{"ctm":[1.568627,0.000000,0.000000,1.568627,0.000000,0.000000]}'></div></div><div id="pf5" class="pf w0 h0" data-page-no="5"><div class="pc pc5 w0 h0"><img class="bi x0 y0 w1 h1" alt="" src="/image.php?url=https://csdnimg.cn/release/download_crawler_static/90182334/bg5.jpg"><div class="t m0 x1a hc y23 ff2e fs4 fc0 sc0 ls0 ws0">8<span class="_ _b"> </span><span class="ff1a">¹</span></div><div class="t m0 x1b hd y24 ff32 fs1 fc0 sc0 ls0 ws0">8<span class="_ _c"> </span><span class="ffc">¹</span></div><div class="t m0 x5 he y25 ff2 fs6 fc1 sc0 ls0 ws0">1<span class="ff33"><span class="ff5">Ù<span class="_ _d"> </span><span class="ff4"></span>ý<span class="ffb">O<span class="ff34"><span class="_ _7"> </span><span class="ff10 fs7 fc0">.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _f"> </span>.<span class="_ _e"> </span>.<span class="_ _f"> </span>.<span class="_ _e"> </span>.<span class="_ _f"> </span>.<span class="_ _e"> </span>.<span class="_ _f"> </span>.<span class="_ _e"> </span>.<span class="_ _f"> </span>.<span class="_ _e"> </span>.<span class="_ _f"> </span>.<span class="_ _e"> </span>.<span class="_ _f"> </span>.<span class="_ _e"> </span>.<span class="_ _f"> </span>.<span class="_ _e"> </span>.<span class="_ _f"> </span>.<span class="_ _e"> </span>.<span class="_ _f"> </span>.<span class="_ _e"> </span>.<span class="_ _f"> </span>.<span class="_ _e"> </span>.<span class="_ _f"> </span>.<span class="_ _e"> </span>.<span class="_ _f"> </span>.<span class="_ _e"> </span>.<span class="_ _f"> </span>.<span class="_ _e"> </span>.<span class="_ _f"> </span>.<span class="_ _e"> </span>.<span class="_ _f"> </span>.<span class="_ _e"> </span>.<span class="_ _f"> </span>.<span class="_ _e"> </span>.<span class="_ _f"> </span>.<span class="_ _e"> </span>.<span class="_ _f"> </span>.<span class="_ _e"> </span>.<span class="_ _f"> </span>.<span class="_ _e"> </span>.<span class="_ _f"> </span>.<span class="_ _e"> </span>.<span class="_ _f"> </span>.<span class="_ _e"> </span>.<span class="_ _f"> </span>.<span class="_ _e"> </span>.<span class="_ _f"> </span>.<span class="_ _e"> </span>.<span class="_ _f"> </span>.<span class="_ _e"> </span>.<span class="_ _f"> </span>.<span class="_ _e"> </span>.<span class="_ _10"> </span>1</span></span></span></span></span></div><div class="t m0 x1c h6 y26 ff10 fs2 fc0 sc0 ls0 ws0">1.1<span class="_ _11"> </span><span class="ff13 fc1">@<span class="ff19">£<span class="ff10">Silv<span class="_ _6"></span>aco<span class="_ _a"> </span>TCAD<span class="_ _e"> </span><span class="fc0">.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _12"> </span>1</span></span></span></span></div><div class="t m0 x1 h5 y27 ff10 fs2 fc0 sc0 ls0 ws0">1.1.1<span class="_ _c"> </span><span class="ff19 fc1">ê<span class="ff22"><span class="ff14">O<span class="ff2b"><span class="_ _f"> </span></span></span></span></span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _13"> </span>1</div><div class="t m0 x1 h5 y28 ff10 fs2 fc0 sc0 ls0 ws0">1.1.2<span class="_ _c"> </span><span class="ff1d fc1">Ä<span class="ff16">u<span class="ff26">Ô<span class="ff23">n<span class="ff21"><span class="ff14">O<span class="ff2b"><span class="_ _14"> </span></span></span></span></span></span></span></span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _13"> </span>1</div><div class="t m0 x1c h8 y29 ff10 fs2 fc0 sc0 ls0 ws0">1.2<span class="_ _11"> </span><span class="fc1">Silv<span class="_ _6"></span>aco<span class="_ _a"> </span>TCAD<span class="_ _15"></span><span class="fc0">.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _c"> </span>2</span></span></div><div class="t m0 x1 h5 y2a ff10 fs2 fc0 sc0 ls0 ws0">1.2.1<span class="_ _c"> </span><span class="ff22 fc1">Ì<span class="ff15"><span class="ff2a">|<span class="ff14"><span class="_ _f"> </span></span></span></span></span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _13"> </span>3</div><div class="t m0 x1 hf y2b ff10 fs2 fc0 sc0 ls0 ws0">1.2.2<span class="_ _c"> </span><span class="ff2e fc1">8<span class="ff1a">¹<span class="ffe">(<span class="ff17"><span class="_ _f"> </span></span></span></span></span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _13"> </span>6</div><div class="t m0 x1 h5 y2c ff10 fs2 fc0 sc0 ls0 ws0">1.2.3<span class="_ _c"> </span><span class="ff26 fc1">©<span class="ff14"><span class="ff23">a<span class="ff20">.<span class="_ _f"> </span></span></span></span></span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _13"> </span>7</div><div class="t m0 x1c hf y2d ff10 fs2 fc0 sc0 ls0 ws0">1.3<span class="_ _11"> </span><span class="fc1">Dec<span class="_ _8"></span>kBuild<span class="ff2c">·<span class="ff1a">-<span class="_ _e"> </span></span></span><span class="fc0">.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _12"> </span>7</span></span></div><div class="t m0 x1 h6 y2e ff10 fs2 fc0 sc0 ls0 ws0">1.3.1<span class="_ _c"> </span><span class="ff2c fc1">·<span class="ff1a">-<span class="ff25"><span class="ff19">ª<span class="_ _f"> </span></span></span></span></span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _13"> </span>8</div><div class="t m0 x1 h8 y2f ff10 fs2 fc0 sc0 ls0 ws0">1.3.2<span class="_ _c"> </span><span class="fc1">Go<span class="_ _a"> </span></span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _16"> </span>8</div><div class="t m0 x1 h8 y30 ff10 fs2 fc0 sc0 ls0 ws0">1.3.3<span class="_ _c"> </span><span class="fc1">Set<span class="_ _14"> </span></span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _10"> </span>9</div><div class="t m0 x1 h8 y31 ff10 fs2 fc0 sc0 ls0 ws0">1.3.4<span class="_ _c"> </span><span class="fc1">T<span class="_ _6"></span>on<span class="_ _6"></span>yplot<span class="_ _a"> </span><span class="fc0">.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _17"> </span>10</span></span></div><div class="t m0 x1 h8 y32 ff10 fs2 fc0 sc0 ls0 ws0">1.3.5<span class="_ _c"> </span><span class="fc1">Extract<span class="_ _e"> </span></span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _18"> </span>12</div><div class="t m0 x1c hf y33 ff10 fs2 fc0 sc0 ls0 ws0">1.4<span class="_ _11"> </span><span class="ff20 fc1">Æ<span class="ff1e">S<span class="ff11">{<span class="_ _15"></span></span></span></span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _4"> </span>18</div><div class="t m0 x5 h10 y34 ff2 fs6 fc1 sc0 ls0 ws0">1<span class="ff4"><span class="ff5">Ù<span class="_ _d"> </span></span><span class="ff35"><span class="ff6">ó<span class="ff33">²</span></span></span><span class="ff5">ý<span class="_ _f"> </span><span class="ff10 fs7 fc0">.<span class="_ _f"> </span>.<span class="_ _e"> </span>.<span class="_ _f"> </span>.<span class="_ _e"> </span>.<span class="_ _f"> </span>.<span class="_ _e"> </span>.<span class="_ _f"> </span>.<span class="_ _e"> </span>.<span class="_ _f"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _f"> </span>.<span class="_ _e"> </span>.<span class="_ _f"> </span>.<span class="_ _e"> </span>.<span class="_ _f"> </span>.<span class="_ _e"> </span>.<span class="_ _f"> </span>.<span class="_ _e"> </span>.<span class="_ _f"> </span>.<span class="_ _e"> </span>.<span class="_ _f"> </span>.<span class="_ _e"> </span>.<span class="_ _f"> </span>.<span class="_ _e"> </span>.<span class="_ _f"> </span>.<span class="_ _e"> </span>.<span class="_ _f"> </span>.<span class="_ _e"> </span>.<span class="_ _f"> </span>.<span class="_ _e"> </span>.<span class="_ _f"> </span>.<span class="_ _e"> </span>.<span class="_ _f"> </span>.<span class="_ _e"> </span>.<span class="_ _f"> </span>.<span class="_ _e"> </span>.<span class="_ _f"> </span>.<span class="_ _e"> </span>.<span class="_ _f"> </span>.<span class="_ _e"> </span>.<span class="_ _f"> </span>.<span class="_ _e"> </span>.<span class="_ _f"> </span>.<span class="_ _e"> </span>.<span class="_ _f"> </span>.<span class="_ _e"> </span>.<span class="_ _f"> </span>.<span class="_ _e"> </span>.<span class="_ _f"> </span>.<span class="_ _a"> </span>21</span></span></span></div><div class="t m0 x1c h6 y35 ff10 fs2 fc0 sc0 ls0 ws0">2.1<span class="_ _11"> </span><span class="fc1">A<span class="_ _19"></span>THENA<span class="_ _a"> </span><span class="ff25">V<span class="ff19">ã<span class="_ _9"> </span></span></span><span class="fc0">.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _4"> </span>21</span></span></div><div class="t m0 x1c h9 y36 ff10 fs2 fc0 sc0 ls0 ws0">2.2<span class="_ _11"> </span><span class="ff11 fc1"><span class="ff12">ý<span class="ff1a">6<span class="ff18">§<span class="_ _15"></span></span></span></span></span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _4"> </span>25</div><div class="t m0 x1 hf y37 ff10 fs2 fc0 sc0 ls0 ws0">2.2.1<span class="_ _c"> </span><span class="ff21 fc1">½<span class="ff15">Â<span class="ff26"><span class="ff25"><span class="_ _f"> </span></span></span></span></span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _1a"> </span>25</div><div class="t m0 x1 h6 y38 ff10 fs2 fc0 sc0 ls0 ws0">2.2.2<span class="_ _c"> </span><span class="ff18 fc1"><span class="ff21">.</span>Ð<span class="ff19">©<span class="ff1d">z<span class="_ _9"> </span></span></span></span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _4"> </span>27</div><div class="t m0 x1 hf y39 ff10 fs2 fc0 sc0 ls0 ws0">2.2.3<span class="_ _c"> </span><span class="ff25 fc1">ó<span class="ff15">²<span class="ff28">Ú<span class="ff22">½<span class="_ _f"> </span></span></span></span></span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _1a"> </span>29</div><div class="t m0 x1 h8 y3a ff10 fs2 fc0 sc0 ls0 ws0">2.2.4</div><div class="t m0 x1d h9 y3b ff18 fs2 fc1 sc0 ls0 ws0">Ä<span class="ff13"><span class="ff24">A<span class="ff20">5<span class="_ _f"> </span><span class="ff10 fc0">.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _1a"> </span>29</span></span></span></span></div><div class="t m0 x1 hf y3c ff10 fs2 fc0 sc0 ls0 ws0">2.2.5<span class="_ _c"> </span><span class="ffe fc1">(<span class="ff17"><span class="ff28">ö<span class="ff2a"><span class="_ _f"> </span></span></span></span></span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _1a"> </span>29</div><div class="t m0 x1 h6 y3d ff10 fs2 fc0 sc0 ls0 ws0">2.2.6<span class="_ _c"> </span><span class="fc1">T<span class="_ _19"></span>onyplot<span class="ff1e">w<span class="ff19">«<span class="_ _9"> </span></span></span><span class="fc0">.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _18"> </span>29</span></span></div><div class="t m0 x1c hf y3e ff10 fs2 fc0 sc0 ls0 ws0">2.3<span class="_ _11"> </span><span class="fff fc1">ü<span class="ff1e"><span class="ff25">ó<span class="ff15">²<span class="_ _15"></span></span></span></span></span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _4"> </span>30</div><div class="t m0 x1 hf y3f ff10 fs2 fc0 sc0 ls0 ws0">2.3.1<span class="_ _c"> </span><span class="ff23 fc1">l<span class="ff2a">f5<span class="ff13">\<span class="_ _f"> </span></span></span></span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _1a"> </span>30</div><div class="t m0 x1 h11 y40 ff10 fs2 fc0 sc0 ls0 ws0">2.3.2<span class="_ _c"> </span><span class="ff23 fc1">*<span class="ff13">Ñ<span class="_ _9"> </span></span></span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _4"> </span>33</div><div class="t m0 x1 hf y41 ff10 fs2 fc0 sc0 ls0 ws0">2.3.3<span class="_ _c"> </span><span class="ff21 fc1">D<span class="ff1d">È<span class="_ _9"> </span></span></span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _9"> </span>.<span class="_ _e"> </span>.<span class="_ _e"> </span>.<span class="_ _4"> </span>35</div><div class="t m0 x1 h6 y42 ff10 fs2 fc0 sc0 ls0 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